Applications of reference cycle building and K-shape clustering for anomaly detection in the semiconductor manufacturing process
Thesis: M. Eng. in Advanced Manufacturing and Design, Massachusetts Institute of Technology, Department of Mechanical Engineering, 2018. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 68-69). === Early and accurate anomaly detection plays a key role in reduc...
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2019
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Online Access: | http://hdl.handle.net/1721.1/120246 |