Time series data analytics : clustering-based anomaly detection techniques for quality control in semiconductor manufacturing
Thesis: M. Eng. in Advanced Manufacturing and Design, Massachusetts Institute of Technology, Department of Mechanical Engineering, 2018. === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 109-110). === Optimizing their manufacturing systems and processes whilst...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2019
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| Online Access: | http://hdl.handle.net/1721.1/120248 |