Highly uniform silicon field emitter arrays fabricated using a trilevel resist process
Thesis: S.M., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2019 === Cataloged from PDF version of thesis. === Includes bibliographical references (pages 99-104). === Silicon field emitter arrays (FEAs) are a potential candidate for electron source...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2019
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| Online Access: | https://hdl.handle.net/1721.1/122550 |