Frequency-pulling effects in microfabricated resonant structures

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1993. === Includes bibliographical references (leaves 138-139). === by Timothy Earl Shirley. === M.S.

Bibliographic Details
Main Author: Shirley, Timothy Earl
Other Authors: Stephen D. Senturia and James K. Roberge.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/12344