Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography

Fabrication of large-area 100 nm-period gratings using achromatic holographic lithography

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992. === Includes bibliographical references (leaves 79-87). === by Anthony Yen. === Ph.D.

Bibliographic Details
Main Author: Yen, Anthony
Other Authors: Henry I. Smith.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/13078

Internet

http://hdl.handle.net/1721.1/13078

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