Metrology and mechanics for manufacturing space-based x-ray grating spectrometers
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Mechanical Engineering, February, 2021 === Cataloged from the official PDF of thesis. === Includes bibliographical references (pages 223-231). === Small errors in critical dimensions (CDs) or deformation of optical components can l...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2021
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| Online Access: | https://hdl.handle.net/1721.1/130846 |