Measurement of adhesion and mechanical properties of thin films using microfabricated structures

Measurement of adhesion and mechanical properties of thin films using microfabricated structures

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1989. === Includes bibliographical references (leaves 188-193). === by Mark George Allen. === Ph.D.

Bibliographic Details
Main Author: Allen, Mark George
Other Authors: Stephen D. Senturia.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Chemical Engineering.
Online Access:http://hdl.handle.net/1721.1/14329

Internet

http://hdl.handle.net/1721.1/14329

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