Integrated model-based run-to-run uniformity control for epitaxial silicon deposition.
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. === Also available online at the MIT Theses Online homepage <http://thesis.mit.edu/> === Includes bibliographical references (p. 241-247). === This electronic version was submitt...
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| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://theses.mit.edu/Dienst/UI/2.0/Describe/0018.mit.etheses%2f2001-26 http://hdl.handle.net/1721.1/16787 |