Development of a scintillating reference grid for spatial-phase-locked electron-beam lithography
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. === Includes bibliographical references (p. 59-61). === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Spec...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/16793 |