A metrological atomic force microscope

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002. === Includes bibliographical references (p. 245-248). === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. ==...

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Bibliographic Details
Main Author: Stein, Andrew John, 1978-
Other Authors: David L. Trumper.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/16885