Chemical vapor deposition and functionalization of fluorocarbon-organosilicon copolymer thin films

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2003. === Includes bibliographical references. === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. ==...

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Bibliographic Details
Main Author: Murthy, Shashi Krishna, 1977-
Other Authors: Karen K. Gleason.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/17038