Piezoelectric MEMS resonator characterization and filter design
Thesis (M. Eng. and S.B.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004. === Includes bibliographical references (p. 98-100). === This thesis presents modeling and first measurements of a new piezoelectric MEMS resonator developed at Draper Labora...
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| Format: | Others |
| Language: | en_US |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/28418 |