Rapid fabrication of deep-submicron Josephson junctions
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004. === Includes bibliographical references (p. 113-116). === A process was designed to fabricate Nb-AlOx-Nb Josephson junctions for quantum computing applications, with the goal of fabricat...
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Format: | Others |
Language: | en_US |
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Massachusetts Institute of Technology
2005
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Online Access: | http://hdl.handle.net/1721.1/28491 |