Rapid fabrication of deep-submicron Josephson junctions

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004. === Includes bibliographical references (p. 113-116). === A process was designed to fabricate Nb-AlOx-Nb Josephson junctions for quantum computing applications, with the goal of fabricat...

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Bibliographic Details
Main Author: Cord, Bryan M. (Bryan Michael), 1980-
Other Authors: Terry P. Orlando.
Format: Others
Language:en_US
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/28491