Effects of mechanical coupling on oscillator frequency in a micromechanical accelerometer
Thesis (S.M. and S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2001. === Includes bibliographical references (p. 75-76). === This thesis presents an analysis of the effect of mechanical coupling on the frequency behavior of the two oscillators in the SOA-3 micromecha...
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2006
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Online Access: | http://hdl.handle.net/1721.1/31098 |