Accurate nanofabrication techniques for high-index-contrast microphotonic devices

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005. === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. === Includes bibliographical references (p....

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Bibliographic Details
Main Author: Barwicz, Tymon
Other Authors: Henry I. Smith and Harry L. Tuller.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2006
Subjects:
Online Access:http://hdl.handle.net/1721.1/33169