Accurate nanofabrication techniques for high-index-contrast microphotonic devices
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005. === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. === Includes bibliographical references (p....
Main Author: | Barwicz, Tymon |
---|---|
Other Authors: | Henry I. Smith and Harry L. Tuller. |
Format: | Others |
Language: | English |
Published: |
Massachusetts Institute of Technology
2006
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/33169 |
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