Integrated thin film batteries on silicon
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005. === Includes bibliographical references (p. 147-158). === Monolithic integration has been implemented successfully in complementary metal oxide semiconductor (CMOS) technology and led to improve...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/33612 |