Optical and mechanical characterization of thin membranes for X-ray lithography

Optical and mechanical characterization of thin membranes for X-ray lithography

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. === Includes bibliographical references (leaves 60-61). === by Gabrielle M. Owen. === M.Eng.

Bibliographic Details
Main Author: Owen, Gabrielle M. (Gabrielle Marie)
Other Authors: Henry I. Smith.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2006
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/34059

Internet

http://hdl.handle.net/1721.1/34059

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