Squeeze-film damping for MEMS structures

Squeeze-film damping for MEMS structures

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 67-70). === by Joseph Y.-J. Young. === M.S.

Bibliographic Details
Main Author: Young, Joseph Y.-J., 1968-
Other Authors: Stephen D. Senturia.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2006
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/34334

Internet

http://hdl.handle.net/1721.1/34334

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