Squeeze-film damping for MEMS structures
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 67-70). === by Joseph Y.-J. Young. === M.S.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/34334 |
| Summary: | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 67-70). === by Joseph Y.-J. Young. === M.S. |
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