Squeeze-film damping for MEMS structures

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 67-70). === by Joseph Y.-J. Young. === M.S.

Bibliographic Details
Main Author:	Young, Joseph Y.-J., 1968-
Other Authors:	Stephen D. Senturia.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2006
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/34334

id	ndltd-MIT-oai-dspace.mit.edu-1721.1-34334
record_format	oai_dc
spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-343342019-05-02T15:43:58Z Squeeze-film damping for MEMS structures Young, Joseph Y.-J., 1968- Stephen D. Senturia. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (p. 67-70). by Joseph Y.-J. Young. M.S. 2006-11-06T16:10:49Z 2006-11-06T16:10:49Z 1998 1998 Thesis http://hdl.handle.net/1721.1/34334 39134663 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 96 p. 14929423 bytes 14929215 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Electrical Engineering and Computer Science
spellingShingle	Electrical Engineering and Computer Science Young, Joseph Y.-J., 1968- Squeeze-film damping for MEMS structures
description	Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (p. 67-70). === by Joseph Y.-J. Young. === M.S.
author2	Stephen D. Senturia.
author_facet	Stephen D. Senturia. Young, Joseph Y.-J., 1968-
author	Young, Joseph Y.-J., 1968-
author_sort	Young, Joseph Y.-J., 1968-
title	Squeeze-film damping for MEMS structures
title_short	Squeeze-film damping for MEMS structures
title_full	Squeeze-film damping for MEMS structures
title_fullStr	Squeeze-film damping for MEMS structures
title_full_unstemmed	Squeeze-film damping for MEMS structures
title_sort	squeeze-film damping for mems structures
publisher	Massachusetts Institute of Technology
publishDate	2006
url	http://hdl.handle.net/1721.1/34334
work_keys_str_mv	AT youngjosephyj1968 squeezefilmdampingformemsstructures
_version_	1719027250578325504

Squeeze-film damping for MEMS structures

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