Development of an immersion maskless lithography system
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2005. === Includes bibliographical references (p. 85-87). === As lithography quickly approaches its limits with current technologies, a host of new ideas is being proposed in hopes of pushing...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/34371 |