Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004. === Includes bibliographical references (p. 203-206). === Current alignment technology is incapable of satisfying the needs of imminent generations of lithography. This dissertation de...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/34563 |