The mechanism of thin film Si nanomachining using femtosecond laser pulses
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2004. === This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections. === Includes bibliographical references (p. 8...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2007
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| Online Access: | http://dspace.mit.edu/handle/1721.1/35752 http://hdl.handle.net/1721.1/35752 |