A voltage-tunable microfabricated accelerometer

A voltage-tunable microfabricated accelerometer

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992. === Includes bibliographical references (leaves 161-163). === by Mark Paul Lubratt. === M.S.

Bibliographic Details
Main Author: Lubratt, Mark Paul
Other Authors: Martin A. Schmidt and Jeffrey H. Lang.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2007
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/37497

Internet

http://hdl.handle.net/1721.1/37497

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