A voltage-tunable microfabricated accelerometer
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992. === Includes bibliographical references (leaves 161-163). === by Mark Paul Lubratt. === M.S.
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2007
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Online Access: | http://hdl.handle.net/1721.1/37497 |