Toward nano-accuracy in scanning beam interference lithography
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2006. === Includes bibliographical references (p. 213-217). === Scanning beam interference lithography is a technique developed in our laboratory which uses interfering beams and a scanning...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2007
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| Online Access: | http://hdl.handle.net/1721.1/37909 |