Load deflection analysis for determining mechanical properties of thin films with tensile and compressive residual stresses

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. === Includes bibliographical references (leaves 24-25). === by Mayank T. Bulsara. === M.S.

Bibliographic Details
Main Author: Bulsara, Mayank T. (Mayank Thakordas)
Other Authors: Stuart B. Brown.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2007
Subjects:
Online Access:http://hdl.handle.net/1721.1/38097