Environmentally benign manufacturing of three dimensional integrated circuits
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007. === Includes bibliographical references (p. 221-231). === Along with scaling down in size, novel materials have been introduced into the semiconductor industry to enable continued improvements i...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/40350 |