Temperature-dependent yield properties of passivated aluminum thin films on silicon wafers
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1996. === Includes bibliographical references (p. 89-94). === by Edison C. Chu. === M.S.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/41414 |