Dynamic nanometer alignment for nanofabrication and metrology
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. === Includes bibliographical references (leaves 163-164). === Future generations of IC fabrication depend in part on continued improvements in lithography. To meet the lithographic chall...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/41799 |