A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating

A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. === Includes bibliographical references (p. 128-131). === by James Stephen Derksen. === M.S.

Bibliographic Details
Main Author: Derksen, James Stephen
Other Authors: Jung-Hoon Chun.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2008
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/43575

Internet

http://hdl.handle.net/1721.1/43575

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