A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. === Includes bibliographical references (p. 128-131). === by James Stephen Derksen. === M.S.

Bibliographic Details
Main Author:	Derksen, James Stephen
Other Authors:	Jung-Hoon Chun.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2008
Subjects:	Mechanical Engineering
Online Access:	http://hdl.handle.net/1721.1/43575

id	ndltd-MIT-oai-dspace.mit.edu-1721.1-43575
record_format	oai_dc
spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-435752019-05-02T16:34:48Z A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating Fluid layer overlap in extrusion-spin coating Derksen, James Stephen Jung-Hoon Chun. Massachusetts Institute of Technology. Dept. of Mechanical Engineering Mechanical Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. Includes bibliographical references (p. 128-131). by James Stephen Derksen. M.S. 2008-11-07T20:13:39Z 2008-11-07T20:13:39Z 1997 1997 Thesis http://hdl.handle.net/1721.1/43575 39919203 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 131 p. application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Mechanical Engineering
spellingShingle	Mechanical Engineering Derksen, James Stephen A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
description	Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. === Includes bibliographical references (p. 128-131). === by James Stephen Derksen. === M.S.
author2	Jung-Hoon Chun.
author_facet	Jung-Hoon Chun. Derksen, James Stephen
author	Derksen, James Stephen
author_sort	Derksen, James Stephen
title	A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
title_short	A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
title_full	A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
title_fullStr	A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
title_full_unstemmed	A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
title_sort	new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
publisher	Massachusetts Institute of Technology
publishDate	2008
url	http://hdl.handle.net/1721.1/43575
work_keys_str_mv	AT derksenjamesstephen anewcoatingmethodforsemiconductorlithographyfluidlayeroverlapinextrusionspincoating AT derksenjamesstephen fluidlayeroverlapinextrusionspincoating AT derksenjamesstephen newcoatingmethodforsemiconductorlithographyfluidlayeroverlapinextrusionspincoating
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A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating

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