A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. === Includes bibliographical references (p. 128-131). === by James Stephen Derksen. === M.S.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/43575 |