Anisotropic dewetting in ultra-thin single-crystal silicon-on-insulator films
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2008. === Includes bibliographical references (p. 153-156). === The single crystal silicon-on-insulator thin film materials system represents both an ideal model system for the study of anisotropic th...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2008
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| Online Access: | http://hdl.handle.net/1721.1/43805 |