Increased semiconductor fabrication capacity through cross-site processing
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management, 1998. === Includes bibliographical references (leaves 68-69). === by Christopher L. Cowger. === S.M.
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2009
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Online Access: | http://hdl.handle.net/1721.1/46221 |