MEMS relays for make-break power switching applications : {111} silicon etched planar electrical contacts
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008. === Includes bibliographical references (p. 193-200). === Relays and switches are of interest in applications such as test equipment, radar, communications, and power systems, amongst others. Unlike solid...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2009
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/46497 |