Advanced materials, process, and designs for silicon photonic integration

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2009. === Includes bibliographical references (p. 229-235). === The copper (Cu) interconnect has become the bottleneck for bandwidth scaling due to its increasing RC time constant with the decreasing...

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Bibliographic Details
Main Author: Sun, Rong, Ph. D. Massachusetts Institute of Technology
Other Authors: Lionel C. Kimerling.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2009
Subjects:
Online Access:http://hdl.handle.net/1721.1/46678