Design, fabrication and mechanical optimization of a flexural high speed nanopositioning imaging stage
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009. === Includes bibliographical references (p. 204-206). === The intent of this research is to generate the knowledge required to design, fabricate and operate a device capable of high speed nano-scale vertical...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2010
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| Online Access: | http://hdl.handle.net/1721.1/50558 |