Design, fabrication and mechanical optimization of a flexural high speed nanopositioning imaging stage

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009. === Includes bibliographical references (p. 204-206). === The intent of this research is to generate the knowledge required to design, fabricate and operate a device capable of high speed nano-scale vertical...

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Bibliographic Details
Main Author: Panas, Robert M. (Robert Matthew)
Other Authors: Martin L. Culpepper.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2010
Subjects:
Online Access:http://hdl.handle.net/1721.1/50558

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