Design of a novel six-axis metrology system for meso-scale nanopositioners
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 55). === The purpose of this research is to develop the best possible means and methods of building a six axis metrology...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2010
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| Online Access: | http://hdl.handle.net/1721.1/54500 |