Method and instrumentation for the measurement and characterization of MEMS fabricated electrical contacts
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 327-332). === MEMS fabricated electrical contacts consist of two MEMS fabricated surfaces which are physically separate...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2010
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| Online Access: | http://hdl.handle.net/1721.1/57891 |