Flexure-based nanopositioning systems : integrated design and control
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 209-219). === This thesis deals with the design and control of flexure-based mechanisms for applications requiring mult...
Main Author: | |
---|---|
Other Authors: | |
Format: | Others |
Language: | English |
Published: |
Massachusetts Institute of Technology
2010
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/57892 |