Optical system for high-speed Atomic Force Microscope

Optical system for high-speed Atomic Force Microscope

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 191-192). === This thesis presents the design and development of an optical cantilever deflection sensor for a high speed...

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Bibliographic Details
Main Author: Lim, Kwang Yong, S.M. Massachusetts Institute of Technology
Other Authors: Kamal Youcef-Toumi.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2011
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/61912

Internet

http://hdl.handle.net/1721.1/61912

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