Limited-area growth of Ge and SiGe on Si
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2011. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 147-159). === The goal of this thesis is to develop and understand processing conditions that improve the su...
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| Language: | English |
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Massachusetts Institute of Technology
2011
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| Online Access: | http://hdl.handle.net/1721.1/62743 |