Design and engineering of low-cost centimeter-scale repeatable and accurate kinematic fixtures for nanomanufacturing equipment using magnetic preload and potting
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, February 2011. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 127-130). === This paper introduces a low-cost, centimeter-scale kinematic coupling fixture for use in nanomanuf...
Main Author: | |
---|---|
Other Authors: | |
Format: | Others |
Language: | English |
Published: |
Massachusetts Institute of Technology
2011
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/65317 |