Design of a three-axis micro-scale metrology system for the characterization of cylindrical flexures
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 57). === The objective of this thesis was to develop a laser metrology system in order to measure the movement in two of...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2012
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| Online Access: | http://hdl.handle.net/1721.1/75672 |