Removal of metal oxide defects through improved semi-anisotropic wet etching process
Thesis (M. Eng. in Manufacturing)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 52). === Data recently collected from an industrial thin film manufacturer indicate that almost 8% of...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2013
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| Online Access: | http://hdl.handle.net/1721.1/78167 |