Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film PZT fabrication processes

Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film PZT fabrication processes

Thesis (M. Eng. in Manufacturing)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 80). === by Jun Bum Lee. === M.Eng.in Manufacturing

Bibliographic Details
Main Author: Lee, Jun B., M. Eng. (Jun Bum). Massachusetts Institute of Technology
Other Authors: Jung-Hoon Chun.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2013
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/78187

Internet

http://hdl.handle.net/1721.1/78187

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