Advanced modeling of planarization processes for integrated circuit fabrication
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 215-225). === Planarization processes are a key enabling technology for continued performance and...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2013
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| Online Access: | http://hdl.handle.net/1721.1/78446 |