Mechanical property characterization of metal nano-particle films for MEMS devices
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 79-83). === Printing-based fabrication methods have emerged as a promising alternative to conventi...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2013
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| Online Access: | http://hdl.handle.net/1721.1/78451 |